Comments (3)
Hi @liurongfang , the epe calculation is based on the following paper:
"ICCAD-2013 CAD contest in mask optimization and benchmark suite" (https://ieeexplore.ieee.org/document/6691131).
I have updated the code for epe support in the branch: "tcad_epe_version", please try. Thx.
from neural-ilt.
Hi @InfamousMeGa, thank you for your work. We successfully reproduced your experiment, but the "shot count" in the paper "Neural-ILT" does not appear, when will this part of the code be open-sourced? Or where can we find it?
from neural-ilt.
Hi @InfamousMeGa, thank you for your work. We successfully reproduced your experiment, but the "shot count" in the paper "Neural-ILT" does not appear, when will this part of the code be open-sourced? Or where can we find it?
Hi @qipan0323, thanks for your interests in Neural-ILT.
The "shot count" of each mask image requires a seperated mask fracturing tool, whose core algorithms (polygon decomposition) & implementations do not belong to Neural-ILT, so it won't be open-sourced here. We appreaciate your understanding.
Instead, would you mind send the mask image files that you want to verfiy to me ([email protected])? I can run the mask fracutring for those mask images on my side, and the following items (for each mask image) will be returned to you:
- mask fracturing results (shot count & runlog);
- a gds file of the fractured mask (you can open it via KLayout).
Thanks,
-Bentian
from neural-ilt.
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